Subsequent processing steps [ μm] | |||||||
---|---|---|---|---|---|---|---|
L ROIa | L ROIb | L ROIc | L ROId | L ROIe | L ROIf | L ROIg | |
L ROIa | 0 | −80 | −435 | −170 | −650 | −275 | −125 |
L ROIb | 80 | 0 | −355 | −90 | −570 | −195 | −45 |
L ROIc | 435 | 355 | 0 | 265 | −215 | 160 | 310 |
L ROId | 170 | 90 | −265 | 0 | −480 | −105 | 45 |
L ROIe | 650 | 570 | 215 | 480 | 0 | 375 | 525 |
L ROIf | 275 | 195 | −160 | 105 | −375 | 0 | 150 |
L ROIg | 125 | 45 | −310 | −45 | −525 | −150 | 0 |