Fig. 2

Projecting error at different working distance and spatial resolution for imaging measurement. a 3D distribution of projecting error at different working distance, the error is less than 0.92 mm. b Variation trend of distance error with working distance, maximal averaged error is 0.5 ± 0.23 mm. c and d Distance error distribution divided along the two orthogonal axes. Overall spatial resolution evaluation using Sparrow criterion, which indicates spatial resolution is 748 μm