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Fig. 2 | BioMedical Engineering OnLine

Fig. 2

From: Electrochemical characteristics of microelectrode designed for electrical stimulation

Fig. 2

Fabrication process flow for parylene-based microelectrode array. a Evaporation of aluminum sacrificial layer onto the silicon wafer, b parylene-C as flexible substrate, c Cr/Au/Cr as the electrodes, metal wires and connecting pads, d parylene-C layer as the insulator layer, e Al layer added as a masking layer, f parylene-C processed with plasma dry etching, g photolithography and lift-off process for drain and source electrodes, h microelectrode array released from the silicon substrate

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