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Table 1 Displacement and force/torque ranges of the 10 mm square sensor in each direction

From: Feasibility of novel four degrees of freedom capacitive force sensor for skin interface force

Direction Displacement range Force/torque detection range
  Min Max Unit Min Max Unit
X −3 3 mm −0.5 0.5 N
Y −3 3 mm −0.5 0.5 N
Z 0 3 mm 0 1.5 N
Θ Z −30 30 degree −1.5 1.5 N·mm